Study On Design and Fabricate a Mems Piezoresistive Accelerometer with Very Low Cross-Axis Sensitivity for Aircraft Sensing Application: Advancements in Design and Fabrication of MEMS Piezoresistive Accelerometers. Journal of Advances and Scholarly Researches in Allied Education, [S. l.], v. 16, n. 2, p. 1585–1590, 2019. Disponível em: https://ignited.in/index.php/jasrae/article/view/10373.. Acesso em: 8 jun. 2025.