Study On Design and Fabricate a Mems Piezoresistive Accelerometer with Very Low Cross-Axis Sensitivity for Aircraft Sensing Application: Advancements in Design and Fabrication of MEMS Piezoresistive Accelerometers. JASRAE [Internet]. 2019 Feb. 1 [cited 2025 Dec. 14];16(2):1585-90. Available from: https://ignited.in/index.php/jasrae/article/view/10373