Study on Process Flow In Mems

Exploring the Choice of Structural Materials in MEMS

Abstract

The first consideration is the choice of MEMSstructural material. We use an insulator to provide high electrical and RFisolation between actuation and RF sections of the devices. To provideelectrical contacts and electrodes for electrostatic actuation, conductingsurfaces are formed on portions of this structural insulator. Thus our MEMSstructures consist of sections that are composed simply of just an insulatorand other sections where there is a tri-layer of conductor/insulator/conductorthat is balanced to manage the stress.