MEMS devices Analytical modeling and simulation with reference to cantilever-based MEMS devices

Exploring the Mechanical Characteristics of MEMS Devices

Abstract

MEMS devices may be anything between a few micrometres and millimetres in size. MEMShave excellent potential for efficiently sensing physical, chemical, and biological factors, which might becombined with VLSI processors. MEMS make use of the mechanical characteristics of a variety ofcomponents, including reservoirs, channels, cantilevers, beams, comb drives, membranes, andreservoirs. The mechanical behaviour of these micromechanical devices in the presence of factors hasto be thoroughly studied in order to make the most use of their characteristics.