Mechanical Analysis and Design of Vibratory Micro Machined Gyroscopes

A Comprehensive Study of Vibratory Micro Machined Gyroscopes

Abstract

Various Micro machined Vibratory Gyroscopes employ a widerange of the mechanical structures as well as actuation and sensing mechanisms.It is followed by a methodical design implementation of vibratory microgyroscope. This completion includes both mechanical and electrical componentsof the micro gyroscopes.